Yield Excursion Report

Use this template to investigate abnormal yield loss for [device/lot/process module].

Template Metadata

Excursion Summary

Identify device, lot range, operation, baseline yield, observed yield, and severity.

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Detection

Describe dashboard alert, wafer sort, inline metrology, defect scan, or customer return signal.

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Containment

List lots on hold, ship stop, tool quarantine, and WIP restrictions.

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Data Analysis

Analyze pareto, wafer maps, SPC charts, tool history, recipes, materials, and split comparisons.

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Root Cause

State confirmed or suspected cause with supporting evidence and rejected hypotheses.

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Corrective Actions

Assign tool, recipe, process, training, supplier, or control updates with owners and dates.

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Release Criteria

Define what data must pass before lots, tools, or shipments are released. Use concise engineering language and include quantitative thresholds.

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Review and Signoff

Document review conclusions, approvals, unresolved items, and next review date.