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Free Semiconductor & Electronics Template

Free Yield Excursion Report Template

Download a free yield excursion report template in Word, PDF, or Markdown. Or bring your notes, PDFs, or a recording and let Docsie AI fill in every section for you.

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Excursion Summary Detection Containment Data Analysis Root Cause Corrective Actions Release Criteria

Yield Excursion Report

Use this template to investigate abnormal yield loss for [device/lot/process module].

Template Metadata

Field Details
Category Semiconductor & Electronics
Owner [Team or owner]
Version [Version number]
Effective Date [Date]
Review Cycle [Monthly / Quarterly / Annual / Event-based]
Status [Draft / In Review / Approved]

Excursion Summary

Identify device, lot range, operation, baseline yield, observed yield, and severity.

Item Details Owner Status
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Detection

Describe dashboard alert, wafer sort, inline metrology, defect scan, or customer return signal.

Item Details Owner Status
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Containment

List lots on hold, ship stop, tool quarantine, and WIP restrictions.

Item Details Owner Status
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Data Analysis

Analyze pareto, wafer maps, SPC charts, tool history, recipes, materials, and split comparisons.

Item Details Owner Status
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Root Cause

State confirmed or suspected cause with supporting evidence and rejected hypotheses.

Item Details Owner Status
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Corrective Actions

Assign tool, recipe, process, training, supplier, or control updates with owners and dates.

Item Details Owner Status
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Release Criteria

Define what data must pass before lots, tools, or shipments are released. Use concise engineering language and include quantitative thresholds.

Item Details Owner Status
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]
[Item or requirement] [Describe the relevant detail, evidence, or decision] [Owner] [Open / Complete]

Notes

[Add context, assumptions, exceptions, evidence links, screenshots, calculations, or reviewer comments.]

Review and Signoff

Document review conclusions, approvals, unresolved items, and next review date.

Role Name Date Notes
Preparer [Name] [Date] [Notes]
Reviewer [Name] [Date] [Notes]
Approver [Name] [Date] [Notes]

Template Structure

What the Yield Excursion Report Template Includes

Use this semiconductor & electronics template as a starting point, then customize each section to match your internal workflow, evidence, and signoff needs.

1

Excursion Summary

Identify device, lot range, operation, baseline yield, observed yield, and severity.

2

Detection

Describe dashboard alert, wafer sort, inline metrology, defect scan, or customer return signal.

3

Containment

List lots on hold, ship stop, tool quarantine, and WIP restrictions.

4

Data Analysis

Analyze pareto, wafer maps, SPC charts, tool history, recipes, materials, and split comparisons.

5

Root Cause

State confirmed or suspected cause with supporting evidence and rejected hypotheses.

6

Corrective Actions

Assign tool, recipe, process, training, supplier, or control updates with owners and dates.

7

Release Criteria

Define what data must pass before lots, tools, or shipments are released. Use concise engineering language and include quantitative thresholds.

Recommended Structure

Write a semiconductor yield excursion report. Structure with these Markdown sections:

Excursion Summary

Identify device, lot range, operation, baseline yield, observed yield, and severity.

Detection

Describe dashboard alert, wafer sort, inline metrology, defect scan, or customer return signal.

Containment

List lots on hold, ship stop, tool quarantine, and WIP restrictions.

Data Analysis

Analyze pareto, wafer maps, SPC charts, tool history, recipes, materials, and split comparisons.

Root Cause

State confirmed or suspected cause with supporting evidence and rejected hypotheses.

Corrective Actions

Assign tool, recipe, process, training, supplier, or control updates with owners and dates.

Release Criteria

Define what data must pass before lots, tools, or shipments are released.

Use concise engineering language and include quantitative thresholds.

Example Filled Template

Yield Excursion Report - PMIC-88 Metal 2 Opens

Excursion Summary

Baseline final test yield: 94.2%
Observed yield: 81.6% across lots W26-1810 to W26-1818
Failure Bin: M2 open, parametric continuity

Containment

  • Hold 11 lots after Metal 2 etch
  • Quarantine etch tool E5 chamber B
  • Stop shipment for affected wafer sort lots

Data Analysis

Wafer maps show edge-ring signature. SPC review found endpoint over-etch trend beginning after chamber clean on 2026-04-28.

Root Cause

Confirmed: endpoint calibration drift after chamber B optical sensor replacement.

Corrective Actions

Action Owner Due
Recalibrate endpoint sensor Etch Eng Complete
Add post-maintenance golden wafer check Process Eng 2026-05-09

Release Criteria

Release held lots only after SEM review confirms no M2 thinning below 0.42 um.

Don't start from a blank template

Let Docsie AI fill in this yield excursion report template

Bring what you already have: meeting notes, an old PDF, a spreadsheet, a walkthrough recording. Docsie AI drafts every section of this yield excursion report template in the structure above, then exports to Word, PDF, or Markdown for review and signoff.

Free to try. The template above was itself generated by Docsie — see it work on real videos at /tutorials/.

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Template FAQ

Yield Excursion Report Template FAQ

Common questions about downloading and generating a yield excursion report template.

Using This Template

Q: What is a yield excursion report template?

A: A yield excursion report template is a structured document for investigate abnormal yield loss for [device/lot/process module].

Q: Is the yield excursion report template really free?

A: Yes. The yield excursion report template is completely free to download in Word (DOCX), PDF, and Markdown formats. No signup or credit card required to download.

Q: How do I turn a video into a yield Excursion Report?

A: Upload a process walkthrough, training recording, or screen capture to Docsie. The AI analyzes the video and generates a complete yield Excursion Report using this template's structure — every required field auto-filled from the footage.

Q: Can I edit the yield excursion report template after downloading?

A: Yes. The DOCX format opens in Microsoft Word or Google Docs. The Markdown format imports into Notion, Confluence, Docsie, or any markdown editor. Customize fields, add your branding, and adapt to your internal workflow.